FALCO
Hyperspectral Camera Thickness Measurement System
Optical measurement system that captures the entire sample and measures in-plane thickness distribution.
Proven track record in SOI silicon wafer shipping inspection and pre-dicing inspection of patterned wafers.
FALCO is a systemthat measures thickness distribution across the entire sample surface by scanning a hyperspectral camera. For cases where a few measurement points suffice, such as 9-point measurement, conventional point measurement is adequate, but when thickness surface distribution is required in 1.0x1.0mm or 5.0x5.0mm mesh, FALCO becomes one of the optimal solutions.
It enables high-speed measurement and has been implemented in SOI silicon wafer shipping inspection and pre-dicing inspection processes for patterned wafers. Like LSI-TG and WSI-TG, it shares the common feature of being non-contact and non-destructive, minimizing impact on samples by using light
FALCO is often delivered as a large-scale system combined with hoop loaders and transfer robots. It is ideal for applications that process large quantities of samples, such as shipping inspections.
Features
In-plane Distribution Measurement
Captures entire sample to obtain in-plane thickness distribution at once.
High-speed Measurement
Measures entire surface thickness distribution quickly, contributing to improved throughput.
Fine Mesh Support
Capable of surface distribution measurement in 1.0x1.0mm or 5.0x5.0mm mesh.
SOI Wafer Inspection
Optimized for SOI silicon wafer shipping inspection.
Large-scale System Compatible
Automated system construction combined with hoop loaders and transfer robots.
Non-contact & Non-destructive
Light-based measurement causes no damage to samples.
Difference from Point Measurement
FALCO (Surface Measurement)
- Measures entire sample at once
- Obtains detailed in-plane distribution
- High-speed measurement with high throughput
- Ideal for shipping inspection
Point Measurement (Conventional)
- Measures only specified points
- Limited such as 9-point measurement
- Requires moving measurement points
- Time-consuming
When FALCO is Optimal
For cases where few measurement points suffice, such as 9-point measurement, conventional point measurement is adequate. However, when thickness surface distribution is required in 1.0x1.0mm or 5.0x5.0mm mesh, FALCO can obtain the entire surface distribution in one measurement, achieving significant time savings and data enrichment.
Main Applications
SOI Wafer Shipping Inspection
Full surface quality inspection of SOI silicon wafers
Pre-dicing Inspection
Pre-dicing inspection of patterned wafers
Thickness In-plane Distribution
Obtaining detailed thickness mapping data
High-volume Sample Inspection
Automated inspection combined with hoop loaders
Quality Control Systems
100% inspection or sampling inspection systems
R&D Applications
Detailed analysis in process development
Large-scale System Support
FALCO is often delivered as a large-scale system combined with hoop loaders and transfer robots. Integration with automated transfer systems enables unmanned continuous measurement.
Transfer System
Hoop Loader & Robot
FALCO Measurement
High-speed Surface Distribution
Data Management
Quality Control System Integration
Measurement Demo Information
Since FALCO is a large system, please bring your samples or
lend them to us for measurement support.
If you are considering in-plane distribution measurement or large-scale inspection systems, please feel free to contact us.